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Univ.-Prof. Dr.-Ing. Horst Fiedler

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professoren

Univ.-Prof. Dr.-Ing. Horst Fiedler – Lehrstuhl für Intelligente Mikrosysteme

Telefon
+49 (0)231 755-2021

Fax
+49 (0)231 755-4450

Sprechstunde:
Dienstags, 14:00 - 15:00 Uhr


Administration:

Ulrike Lippe

Campus Nord
Gebäude : CT-G3, Raum 3.21
Telefon: +49 (0)231 755-3203


Adresse

Prof. Dr.-Ing. Horst Fiedler
Technische Universität Dortmund
Fakultät für Elektrotechnik und Informationstechnik
Lehrstuhl für Intelligente Mikrosysteme
Emil-Figge-Str. 68 (Einfahrt 12-15)
44227 Dortmund
Deutschland


Campus Adresse

Campus Nord
CT-G3
Raum 3.19


Vorlesungen

  • Halbleiterbauelemente
  • Digitale Schaltungen
  • Rechnergestützter Entwurf integrierter Schaltungen
  • Mikro- und Nanoelektronik
  • Mikrosystemintegration

Vorträge / Veröffentlichungen

 

  • F. J. Giebel, M. Köhle, T. Stramm, K. T. Kallis, H. L. Fiedler
    „Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements “
    In: Journal of Sensors and Sensor Systems, 6, 2017, pp. 367-374

  • F. J. Giebel, M. Köhle, F. M. Münchenberger, K. T. Kallis, H. L. Fiedler
    „MEMS-Vakuummeter basierend auf der Leitfähigkeitsmessung von Gasen“
    Tagungsband zur 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016, Nürnberg 2016, pp. 790-796

  • F. J. Giebel, M. Köhle, P. Czyba, K. J. Kolander, K. T. Kallis, C. M. Zimmer, H. L. Fiedler
    „Fabricating freely suspended structures optimized regarding mechanical and electrochemical stability for sensor applications“
    In: Microelectronic Engineering 159 (2016), pp. 202–208

  • K. T. Kallis, R. R. Poloczek, M. Seiffert, S. Brabender, H. L. Fiedler, P. Glösekötter
    " On-Chip vs Off-Chip -Nanosensor Readout Strategies"
    5th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2016, June 26-30

  • P. Czyba, S. Brabender, K. T. Kallis, H. L. Fiedler
    "Modelling and Development of Germanium Based Drift Detector Devices"
    5th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2016, June 26-30

  • F. J. Giebel, M. Köhle, F. M. Münchenberger, K. T. Kallis, H. L. Fiedler
    „MEMS-Vakuummeter basierend auf der Leitfähigkeitsmessung von Gasen“
    18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016, Nürnberg, 10. bis 11. Mai 2016

  • R. Poloczek, C. Kontis, K. Kallis, H. Fiedler
    "Alternative Konzepte zur Integration und zum Auslesen von Drucksensoren"
    Tagungsband zur 18. GMA/ITG-Fachtagung Sensoren und Messsysteme, Nürnberg 2016, May 10-11, pp. 797-804

  • R. R. Poloczek, K. T. Kallis, C. Kontis, M. Schneider and H. L. Fiedler
    „Membrane Stiffness Tuning for Micro-machined Pressure Sensors”
    EnFI 2015 Conference – Engineering of functional Interfaces, Hannover, Germany, 2015, July 06-07

  • F. J. Giebel, M. Köhle, P. Czyba, K. Kolander, K. T. Kallis, C. M. Zimmer and H. L. Fiedler
    „Manufacturing a chip to accelerate electrons on microscopic scale for gas sensor applications”
    41st International Conference on Micro- and Nanoengineering (MNE 2015), The Hague, Netherlands 2015, September 21-24

  • S. Ebschke, J. Zimmermann, R. R. Poloczek, K. T. Kallis, H. L. Fiedler
    "Towards a nanoscale sensor system for intra-arterial simultaneous blood flow and pressure measurement"
    EnFI 2015 Conference, Hannover, Germany 2015, July 6 - 7

  • S. Ebschke, J. Zimmermann, A. Wiggershaus, K. T. Kallis, H. L. Fiedler
    „Test environment for characterization of a nanoscale sensor system consisting of fluid flow sensors based
    on the Thermal-Time-of-Flight (TToF) principle and absolute pressure sensors”
    Proceedings of the 2014 IEEE Sensors Conference, Valencia, Spain 2014, November 02-05, pp. 1340-1343

     

  • S. Ebschke, J. Zimmermann, A. Wiggershaus, K. T. Kallis, H. L. Fiedler
    " Test environment for characterization of a nanoscale sensor system consisting of fluid flow sensors based on the
    Thermal-Time-of-Flight (TToF) principle and absolute pressure sensors "
    IEEE Sensors 2014, Valencia, Spain 2014,  November 3 - November 5

  • S. Ebschke, J. Gerwinn, A. V. Patel, K. T. Kallis, H. L. Fiedler
    "Modelling and Simulation of a Thermal-Time-of-Flight (TToF) Sensor for measuring the blood flow velocity"
    BMT 2014 - 48th DGBMT Annual Conference, Hannover, Germany 2014, October 8 - October 10


  • S. Brabender, K. Kolander, K. T. Kallis, H. L. Fiedler
    "Wafer Extension for Cost-Effective Front to Back Side Alignment"
    In: Journal of Nano Research, Volume 27 (2014), pp. 1-4

  • K. T. Kallis, M. Seiffert, H. L. Fiedler and P. Glösekötter
    „Nanosensor readout concepts”
    40th International Conference on Micro- and Nanoengineering (MNE'14), Lausanne, Switzerland  2014,
    September 22-26

  • S. Ebschke, M. Wieker, J. Gerwinn, A. Loechte, K. T. Kallis and H. L. Fiedler
    „Charging effects on SOI based NEMS by the example of a nanoscale Thermal-Time-of-Flight (TToF) sensor”
    Proceedings of the 14th IEEE International Conference on Nanotechnology, Toronto, Canada 2014, August 18-21,
    pp. 785-788

  • C. Kontis, R. R. Poloczek, A. Balkenohl, H.  Schuh, K. T. Kallis and H. L.  Fiedler

    Full Complementary Metal Oxide Semiconductor Compatible Integration of Nano-Structured Absolute
    Pressure Sensors
    Journal Quantum Matter, Volume 3, Number 4, August 2014, pp. 381-387(7)

  • S. Ebschke, M. Wieker, J. Gerwinn, A. Loechte, K. T. Kallis and H. L. Fiedler
    "Charging effects on SOI based NEMS by the example of a nanoscale Thermal-Time-of-Flight (TToF) sensor"
    14th IEEE International Conference on Nanotechnology, Toronto, Canada 2014, August 18 - August 21

  • S. Ebschke, M. Wieker, J. Gerwinn, K. T. Kallis and H. L. Fiedler
    "Nanoscale thermal-time-of-flight sensor for measuring blood flow velocity"
    10th International Nanotechnology Symposium - New ideas for industry -, Dresden, Germany 2014, July 1 - July 3

  • S. Ebschke, R .R. Poloczek and K .T. Kallis and H. L. Fiedler
    „Konzept eines nanoskaligen Sensorsystems zur simultanen Erfassung von Druck und Flussgeschwindigkeit in Fluiden“
    ITG Fachbericht 250 zur 17. ITG/GMA Fachtagung Sensoren und Messsysteme 2014, Nürnberg, Germany 2014,
    ISBN 978-3-8007-3622-5

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "Konzept eines nanoskaligen Sensorsystems zur simultanen Erfassung von Druck und Flussgeschwindigkeit in Fluiden"
    17. ITG / GMA Fachtagung Sensoren und Messsysteme 2014, Nürnberg, Germany 2014, June 3 – June 4 

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    „Beides gleichzeitig messen - Nanoskaliger Kombisensor zur simultanen Erfassung von Gasdruck und Gasfluss“
    In: chemie&more, Vol. 3.14 (2014), pp 10-12

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "A monocrystalline absolute pressure sensor with a pseudo-MOSFET read-out device for life-science applications"
    IEEE Sensors Conference, Baltimore, Maryland, USA 2013, November 4 - November 6

  • C. Kontis, R. R. Poloczek, K .T. Kallis and H. L. Fiedler

    "Full CMOS-Compatible Integration of Nano-Structured Absolute Pressure Sensors"
    4th International Conference from Nanoparticles and Nanomaterials to
    Nanodevices and Nanosystems 4th IC4N-2013, Corfu, Greece 2013, June 16-20

  • S. Brabender, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    „Wafer extension for cost-effective front to back side alignment”,
    4th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2013,
    Corfu, Greece 2013, June 16-20

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "Creating a monocrystalline membrane via etching and sealing of nanoholes considering its sealing behaviour"
    Journal of Nano Research Vol. 25 (2013), pp 49-54

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    Planar technology integration of monocrystalline Silicon-membranes using nanoholes"
    13th IEEE International Conference on Nanotechnology, Beijing, China 2013, August 5 - August 8

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    „Sticking prevention of nano-structured monocrystalline silicon-membranes"
    4th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2013, Corfu,
    Greece 2013, June 16 - June 20

  • K. T. Kallis, V. V. Vendt, C. Küchenmeister and H. L. Fiedler
    „Preparation of nanoscale thermal time of flight sensors by e-beam lithography”,
    In: Microelectronic Engineering, Volume 97, Sept. 2012, S. 357-360

  • K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    "Parameter fluctuations in multiple patterned deca-nm scaled CMOS structures"
    In: Journal of Nano Research , Vol. 17 (Feb.2012), S. 157-163

  • K. T. Kallis, J. T. Horstmann, C. Küchenmeister, L. O. Keller and H. L. Fiedler
    "Enhanced lithography independent MOSFET-fabrication on bulk silicon with sub-50 nm-dimensions"
    Transactions on Systems, Signals & Devices, Issues on Sensors, Circuits & Instrumentation Systems,
    Vol. 5, No. 4 , Dec. 2011

  • K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    "Parameter fluctuations in multiple patterned deca-nm scaled CMOS structures"
    Journal of Nano Research, in press (2011)

  • K. T. Kallis, V. V. Vendt, C. Küchenmeister and H. L. Fiedler
    "Nanoscale thermal time of flight sensors"
    37th International Conference on Micro- and Nanoengineering (MNE'11), Berlin, Germany 2011,
    Sept. 19-23

  • S. Brabender, K. T. Kallis, C. Kontis and H. L. Fiedler
    "Low temperature PECVD-SiO2 on germanium"
    37th International Conference on Micro- and Nanoengineering (MNE'11), Berlin, Germany ,
    Sept. 19-23

  • R. R. Polczek, P. Filusch, K. T. Kallis and H. L. Fiedler
    "Manufacturing of cavities with monocrystalline silicon membranes for pressure sensors
    using annealing forming gas procedures"
    37th International Conference on Micro- and Nanoengineering (MNE'11), Berlin, Germany 2011,
    Sept. 19-23

  • K. T. Kallis, L. O. Keller, C. Küchenmeister, J. T. Horstmann, J. Knoch and H. L. Fiedler
    „Nanofin based filaments for sensor applications“
    Proceedings of the 36th International Conference on Micro- and Nanoengineering, MNE’10,
    Genoa, Italy, Microelectronic Engineering, Volume 88, Issue 8, August 2011, pp. 2290-2293

  • K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    "Parameter fluctuations in multiple patterned deca-nm scaled CMOS structures"
    3rd International Conference from Nanoparticles and Nanomaterials to Nanodevices and
    Nanosystems, Crete, Greece 2011, July 26 - July 29

  • K. T. Kallis, L. O. Keller, C. Küchenmeister, J. T. Horstmann, J. Knoch and H. L. Fiedler
    "Nanofin based filaments for sensor applications"
    Microelectronic Engineering Volume 88, Issue 8, August 2011, Pages 2290-2293,
    Proceedings of the 36th International Conference on Micro- and Nano-Engineering (MNE)

  • J. T. Horstmann, K. T. Kallis and H. L. Fiedler
    "Reliability and Electrical Parameter Fluctuations of sub-50nm MOS-Transistors"
    Micromaterials and Nanomaterials 12 (2010), pp. 32-38, ISSN 1619-2486

  • D. Batas, S. Knaak and H. L. Fiedler
    "Spicedim -­ A Design Tool for Supporting Circuit Sizing of Analog CMOS-­Circuits"
    Proceedings of the 22nd IEEE International Conference on Microelectronics, Cairo, Dec. 2010

  • D. Batas and H. L. Fiedler
    "A Python Interface for SPICE-based Simulations"
    Proceedings of the 7th IEEE International Conference on Signals and Electronic Systems",
    pp. 161 - 164, Gliwice, Poland, 2010

  • D. Batas and H. L. Fiedler
    " SCC - A Graphical Tool for Scripted Circuit Sizing of Integrated CMOS-Circuits Based on a General
    Description of the Sizing Process"
    Proceedings of the 7th IEEE International Conference on Signals and Electronic Systems",
    pp. 257 - 260, Gliwice, Poland, 2010

  • K. T. Kallis, L. O. Keller, C. Küchenmeister, J. T. Horstmann, J. Knoch and H. L. Fiedler
    „Nanofin based filaments for sensor applications“
    36th International Conference on Micro- and Nanoengineering, MNE’10, Genoa, Italy,
    19. September - 22. September 2010

  • R. R. Poloczek, K. T. Kallis, L. O. Keller and H. L. Fiedler
    „A new cost-effective Method of Planarisation for Multiple Metal Layers in the Sub-100 nm-Region“,
    Journal of Nanoscience and Nanotechnology, Volume 10, Number 9 September 2010, S. 6046-6048

  • L. O. Keller, K. T. Kallis, R. R. Poloczek and H. L. Fiedler
    „Nano-Fin based Mercury-Sensor for environmental surveillance“
    Journal of Nanoscience and Nanotechnology, Volume 10, Number 9 September 2010,
    S. 5921-5925

  • D. Batas and H. L. Fiedler
    "A Memristor Spice Implementation and a New Approach for Magnetic Flux Controlled Memristor Modeling"
    IEEE Transactions on Nanotechnology, DOI 10.1109/TNANO.2009.2038051, in press


  • D. Batas and H. L. Fiedler
    "Accuracy Improvements for Analog Linear Interpolation"
    Proceedings of the STW "Program for Research on Integrated Systems and Circuits" ProRISC2009,
    Nov. 26 - 28, 2009, Veldhoven, the Netherlands, pp. 306 - 310, ISBN: 978-90-73461-62-8


  • S. Brabender, K. T. Kallis, L. O. Keller and H. L. Fiedler
    „Optimization of reactive ion etching processes using desirability"
    Proceedings of the 35th International Conference on Micro and Nanoengineering, MNE’09,
    28. September - 1. Oktober 2009, Ghent, Belgium 2010, S. 1413-1415

  • K. T. Kallis, L. O. Keller and H. L. Fiedler
    „An advanced LOCOS-Process for the Sub-50 nm-Region using Low-Stress PECVD-Silicon Nitrides“
    In: Journal of Nano Research Volume 6, 2009, S. 23-27

  • S. Brabender, K. T. Kallis, L. O. Keller and H. L. Fiedler
    „Optimization of reactive ion etching processes using desirability“
    35th International Conference on Micro and Nanoengineering, MNE’09, Ghent, Belgium 2009,
    September, 28 - October 1

  • L. O. Keller, K. T. Kallis, H. L. Fiedler and J. Knoch
    "A design consideration for a new nano-fin based Mercury-sensor"
    Spanish Conference on Electron Devices, 2009

  • R. R. Poloczek, K. T. Kallis, L. O. Keller, S. Brabender and H. L. Fiedler
    „Multiple Nanolayers for optimal membrane stiffness in integrated high pressure sensors“
    2nd International Conference from Nanoparticles and Nanomaterials to Nanodevices and
    Nanosystems 2009, Rhodes, Greece 2009, 28. Juni - 3. July

  • K. T. Kallis, J. T. Horstmann, C. Küchenmeister, L. O. Keller and H. L. Fiedler
    „Cost-Effective MOSFET-Transistors on Bulk Silicon in the Deep Sub-50 nm-Region“,
    6th International Multi-Conference on Systems, Signals and Devices, SSD'09, March 23-26, 2009, Djerba,
    Tunisia, Tagungsband: IEEE Press ISBN 978-9973-959-16-8

  • L. O. Keller, K. T. Kallis, H. L. Fiedler and J. Knoch
    „Towards Nano-Fin based Mercury Sensors“
    Proceedings of the 2009 7th Spanish Conference on Electron Devices, SCED'09, February 11-13
    Santiago di Compostella, Spain 2009, pp. 342-344

  • L. O. Keller, K. T. Kallis, H. L. Fiedler and J. Knoch
    „Towards Nano-Fin based Mercury Sensors“, 7th Spanish Conference on Electron Devices,
    Santiago di Compostela, Spain 2009, February 11-13

  • K. T. Kallis, J. T. Horstmann, C. Küchenmeister, L. O. Keller and H. L. Fiedler
    „Cost-Effective MOSFET-Transistors on Bulk Silicon in the Deep Sub-50 nm-Region“
    6th International Multi-Conference on Systems, Signals and Devices, SSD'09

  • K. T. Kallis, L. O. Keller and H. L. Fiedler
    "Method for Local Oxidation in the Sub-50 nm-Region"
    34th International Conference on Micro and Nanoengineering, MNE’08, Athen, Greece 2008, September 15 – 18

  • J. T. Horstmann, K. T. Kallis and H. L. Fiedler
    „Experimental Threshold Voltage Fluctuations of 30 nm-NMOS-Transistors Manufactured by a Lithography
    Independent Structure Definition Process“
    Proceedings of the 34th International Conference on Micro and Nanoengineering, MNE’08, September 15 - 18,
    Athen 2008, S.1054-1056

  • K. T. Kallis, L. O. Keller and H. L. Fiedler
    "An advanced LOCOS-Process for the Sub-50 nm-Region using Low-Stress PECVD-Silicon Nitrides "
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2008,
    Porto Carras, Greece 2008, June 16-18

  • L. O. Keller, K. T. Kallis and H. L. Fiedler
    "Nano-Fin based Mercury-Sensor for environmental surveillance"
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2008,
    Porto Carras, Greece 2008, June 16-18

  • R. R. Poloczek, L. O. Keller, K. T. Kallis and H. L. Fiedler
    "A new cost-effective Method of Planarisation for Multiple Metal Layers in the Sub-100 nm-Region"
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2008,
    Porto Carras, Greece 2008, June 16-18

  • J. T. Horstmann, K. T. Kallis and H. L. Fiedler
    "Experimental Threshold Voltage Fluctuations of 30 nm-NMOS-Transistors Manufactured by a Lithography
    Independent Structure Definition Process“
    34th International Conference on Micro and Nanoengineering, MNE’08, Athens, Greece 2008, September 15-18

  • D. Batas and H. L. Fiedler
    "An Analog CMOS Arctangent Function Generator"
    Proceedings of the 10th IEEE International Workshop on Symbolic and Numerical Methods, Modeling and
    Applications to Circuit Design SM2ACD 2008, October 7 – 8, 2008, Erfurt, Germany, ISBN 978-3-00-025761-2,
    pp. 37-43

  • K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    " Lithography Independent High Accuracy Fabrication and Characterization of Next Generation Nano-MOS-
    Transistors with L=25 nm and W=75 nm "
    Proceedings of the 32nd International Conference on Micro and Nanoengineering, MNE’06, September 17 –
    20, Barcelona 2007, pp 1484-1487

  • K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    " Lithography Independent High Accuracy Fabrication and Characterization of Next Generation Nano-MOS-
    Transistors with L=25 nm and W=75 nm "
    Proceedings of the 32nd International Conference on Micro and Nanoengineering, MNE’06, September 17 –
    20, Barcelona 2007

  • D. Batas and H. L. Fiedler
    "Computer-Based Design of Analog Integrated CMOS-Circuits"
    Proceedings of the 11th WSEAS International Conference on Circuits 2007, July 23 – 25, 2007, Agios
    Nikolaos, Crete, Greece, ISBN: 978-960-8456-89-8, pp. 31 - 36 (ISSN: 1790-5117)

  • K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    „Lithography Independent High Accuracy Fabrication and Characterization of Next Generation
    Nano-MOS-Transistors with L=25 nm and W=75 nm“,
    32nd International Conference on Micro and Nanoengineering, MNE’06, Barcelona, Spain 2006, September 15-18

  • K. T. Kallis, J. T. Horstmann, A. Wiggershaus and H. L. Fiedler
    "Manufacturing Considerations of Lithography Independent Nano-MOS-Transistors in the sub-25 nm-region"
    8th International Conference on Solid-State and Integrated Circuit Technology Proceedings, IEEE Catalog
    Number: 06EX1294 Shanghai Oct 2006, pp 55-57

  • K. T. Kallis, J. T. Horstmann, A. Wiggershaus and H. L. Fiedler
    "Manufacturing Considerations of Lithography Independent Nano-MOS-Transistors in the sub-25 nm-region"
    8th International Conference on Solid-State and Integrated Circuit Technology, Shanghai Oct 2006

  • W. Duengen, R. Job, T. Mueller, Y. Ma and W. R. Fahrner (FU Hagen)
    L. O. Keller, J. T. Horstmann and H. L. Fiedler (TU Dortmund)

    "Blistering of implanted crystalline silicon by plasma hydrogenation investigated by Raman scattering
    spectroscopy"
    Journal of Applied Physics 100 (2006), S.124906 (5 Seiten)

  • W. Duengen, R. Job, T. Mueller, Y. Ma, Y. L. Huang and W. R. Fahrner (FU Hagen), L. O. Keller,
    J. T. Horstmann and H. L. Fiedler (TU Dortmund)

    "Thermal Evolution of Hydrogen Related Defects in Hydrogen Implanted Czochralski Silicon Investigated by
    Raman Spectroscopy and Atmoic Force Microscopy"
    Journal of Applied Physics 100 (2006), S.034911 (5 Seiten)

  • C. Horst, K. T. Kallis, J. T. Horstmann, and H. L. Fiedler
    "CMOS Compatible Fabrication Technique for Nano-Transistors by Conventional Optical Lithography",
    Journal Of Semiconductor Technology And Science, Vol. 4, No. 1, March 2004, pp 41-44