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Dipl.-Ing. Lars Ole Keller

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Halbleitertechnologie

Dr.-Ing. Lars Ole Keller – Wissenschaftlicher Angestellter

Ausgeschieden mit Datum 31. 03. 2010 !

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Campus Adresse


Arbeitsgebiete
  • Halbleitertechnologie
  • Mikromechanik
  • Sensorik
Veröffentlichungen
  • K. T. Kallis, J. T. Horstmann, C. Küchenmeister, L. O. Keller and H. L. Fiedler
    "Enhanced lithography independent MOSFET-fabrication on bulk silicon with sub-50 nm-dimensions"
    Transactions on Systems, Signals & Devices, Issues on Sensors, Circuits & Instrumentation Systems,
    Vol. 5, No. 4 (Dec. 2011)

  • K. T. Kallis, L. O. Keller, C. Küchenmeister, J. T. Horstmann, J. Knoch and H. L. Fiedler
    "Nanofin based filaments for sensor applications"
    Proceedings of the 36th International Conference on Micro- and Nano-Engineering (MNE)
    In: Microelectronic Engineering, Volume 88, Issue 8 (August 2011), Pages 2290-2293


  • K. T. Kallis, L. O. Keller, C. Küchenmeister, J. T. Horstmann, J. Knoch and H. L. Fiedler
    „Nanofin based filaments for sensor applications“
    36th International Conference on Micro- and Nanoengineering (MNE’10), Genoa, Italy 2010,
    Sept. 19-22

  • R. R. Poloczek, K. T. Kallis, L. O. Keller and H. L. Fiedler
    „A new cost-effective Method of Planarisation for Multiple Metal Layers in the Sub-100 nm-Region“
    In : Journal of Nanoscience and Nanotechnology, Volume 10, Number 9 (Sept. 2010), S. 6046-6048

  • L. O. Keller, K. T. Kallis, R. R. Poloczek and H. L. Fiedler
    „Nano-Fin based Mercury-Sensor for environmental surveillance“
    In : Journal of Nanoscience and Nanotechnology, Volume 10, Number 9 (Sept. 2010), S. 5921-5925

  • S. Brabender, K. T. Kallis, L. O. Keller and H. L. Fiedler
    „Optimization of reactive ion etching processes using desirability“
    Proceedings of the 35th International Conference on Micro and Nanoengineering (MNE’09),
    Sept. 28 - Oct. 01., Ghent, Belgium 2010, S. 1413-1415

  • K. T. Kallis, J. T. Horstmann, C. Küchenmeister, L. O. Keller and H. L. Fiedler
    „Cost-Effective MOSFET-Transistors on Bulk Silicon in the Deep Sub-50 nm-Region“
    6th International Multi-Conference on Systems, Signals and Devices, SSD'09, March 23-26, 2009, Djerba, Tunisia, Tagungsband: IEEE Press ISBN 978-9973-959-16-8

  • L. O. Keller, K. T. Kallis, H. L. Fiedler and J. Knoch
    A design consideration for a new nano-fin based Mercury-sensor
    Spanish Conference on Electron Devices, 2009

  • R. R. Poloczek, K. T. Kallis, L. O. Keller, S. Brabender and H. L. Fiedler
    „Multiple Nanolayers for optimal membrane stiffness in integrated high pressure sensors“
    2nd International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2009, Rhodes, Greece 2009, June 28 -July 03

  • L. O. Keller, K. T. Kallis, H. L. Fiedler and J. Knoch
    „Towards Nano-Fin based Mercury Sensors“
    7th Spanish Conference on Electron Devices, 2009

  • K. T. Kallis, L. O. Keller and H. L. Fiedler
    „An advanced LOCOS-Process for the Sub-50 nm-Region using Low-Stress PECVD-Silicon Nitrides“
    In : Journal of Nano Research, Volume 6 (2009), S. 23-27

  • K. T. Kallis, J. T. Horstmann, C. Küchenmeister, L. O. Keller and H. L. Fiedler
    „Cost-Effective MOSFET-Transistors on Bulk Silicon in the Deep Sub-50 nm-Region“
    6th International Multi-Conference on Systems, Signals and Devices (SSD'09), Djerba, Tunesia 2009,
    March 23-26, Proceedings: IEEE Press, ISBN 978-9973-959-16-8

  • K. T. Kallis, L. O. Keller and H. L. Fiedler
    "Method for Local Oxidation in the Sub-50 nm-Region"
    34th International Conference on Micro and Nanoengineering (MNE’08), Sept. 15-18, Athen 2008

  • L. O. Keller, K. T. Kallis and H. L. Fiedler
    "Nano-Fin based Mercury-Sensor for environmental surveillance"
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2008, Porto Carras, Greece 2008

  • K. T. Kallis, L. O. Keller and H. L. Fiedler
    "An advanced LOCOS-Process for the Sub-50 nm-Region using Low-Stress PECVD-Silicon Nitrides "
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2008, Porto Carras, Greece 2008

  • R. R. Poloczek, L. O. Keller, K. T. Kallis and H. L. Fiedler
    "A new cost-effective Method of Planarisation for Multiple Metal Layers in the Sub-100 nm-Region"
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2008, Porto Carras, Greece 2008

  • W. Duengen, R. Job, T. Mueller, Y. Ma and W. R. Fahrner (FU Hagen) , L. O. Keller, J. T. Horstmann and H. L. Fiedler (TU Dortmund)
    "Blistering of implanted crystalline silicon by plasma hydrogenation investigated by Raman scattering spectroscopy"
    In: Journal of Applied Physics, 100 (2006), S.124906 (5 Seiten)

  • W. Duengen, R. Job, T. Mueller, Y. Ma, Y. L. Huang and W. R. Fahrner (FU Hagen) , L. O. Keller, J. T. Horstmann and H. L. Fiedler (TU Dortmund)
    "Thermal Evolution of Hydrogen Related Defects in Hydrogen Implanted Czochralski Silicon" Investigated by Raman Spectroscopy and Atmoic Force Microscopy"
    In: Journal of Applied Physics 100 (2006), S.034911 (5 Seiten)

  • K. U. Harms, L. O. Keller and J. T. Horstmann
    "CMOS-kompatible Herstellung eines elektrostatisch angetriebenen Oberflächen-MEMS-Schalters für RF-Anwendungen"
    Tagungsband Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, 6 (2003), Seite 213-217