F. J. Giebel, M. Köhle, P. Czyba, K. Kolander, K. T. Kallis, C. M. Zimmer and H. L. Fiedler
„Manufacturing a chip to accelerate electrons on microscopic scale for gas sensor applications"
41st International Conference on Micro- and Nanoengineering (MNE'15), The Hague, Netherland 2015,
- K. T. Kallis
„Pulsed Magnetron Sputtering in Practice"
Workshop on dry processing, Jülich, Germany 2015, September 14-15
R. R. Poloczek, K. T. Kallis, C. Kontis, M. Schneider and H. L. Fiedler
„Membrane Stiffness Tuning for Micro-machined Pressure Sensors”
EnFI 2015 Conference – Engineering of functional Interfaces, Hannover, Germany, 2015, July 06-07
K. T. Kallis
"Pulsed Magnetron Sputtering in Practice"
Workshop on dry processing, Jülich, Germany 2015
- S. Ebschke, J. Zimmermann, R. R. Poloczek, K. T. Kallis, H. L. Fiedler
"Towards a nanoscale sensor system for intra-arterial simultaneous blood flow and pressure measurement"
EnFI 2015 Conference, Hannover, Germany 2015, July 06 -07
- S. Ebschke, M. Wieker, M. Muehlbauer, K. T. Kallis and H. L. Fiedler
"Optimization of a nanoscale Thermal-Time-of-Flight (TToF) sensor by using electron-beam lithography (EBL)"
Workshop Ionenstrahlen & Nanostrukturen, Paderborn, Germany 2014, July 20 – July 22
- K. T. Kallis
„Intelligente Mikro- und Nanosysteme - wenn Visionen zur Realität werden “
6. NRW Nanokonferenz, Dortmund, Germany 2014, December 1-2
M. R. Müller, U. Künzelmann, S. Menzel, I. Petrov, K. T. Kallis and J. Knoch
„Tackling Hillocks Growth after Aluminum CMP”
Proceedings of the 2014 International IEEE Conference on Planarization/CMP Technology (ICPT), Kobe,
Japan 2014, November 19-21, pp. 129-132 (peer reviewed)
- S. Ebschke, J. Gerwinn, A. V. Patel, K. T. Kallis, H. L. Fiedler
"Modelling and Simulation of a Thermal-Time-of-Flight (TToF) Sensor for measuring the blood flow velocity"
BMT 2014 - 48th DGBMT Annual Conference, Hannover, Germany 2014, October 8 - October 10