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Dipl.-Ing. Klaus Kallis

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Halbleitertechnologie


Dr.-Ing. Klaus Kallis – Technologieleiter
Vertretungsprofessor AG Technologien der Mikro- und Nanotechnik


Telefon
+49 (0)231 755-2023

Fax
+49 (0)231 755-4450


Adresse

Dr.-Ing. Klaus Kallis
Technische Universität Dortmund
Fakultät für Elektrotechnik und Informationstechnik
Lehrstuhl für Intelligente Mikrosysteme /
AG Technologien der Mikro- und Nanotechnik
Emil-Figge-Str. 68 (Einfahrt 12-15)
44227 Dortmund
Deutschland


Campus Adresse

Campus Nord
CT-G3
Raum 3.11

Arbeitsgebiete

  • Vertretungsprofessur im Arbeitsgebiet Technologien der Mikro- und Nanotechnik
  • Leitung der Technologielinie
  • Nanoelektromechanische Systeme (NEMS)
  • Nanosensorik
  • Nano-MOS-Transistoren im sub-100nm-Bereich
  • Qualitätsbeauftragter der Fakultät Elektro- und Informationstechnik für die Lehre

Lehre

  • Fortschrittliche Prozesse der Halbleitertechnologie
  • Halbleitertechnologie
  • Mikro- und Nanoelektronik
  • Ringvorlesung "Entwicklung, Herstellung und Analyse hochintegrierter Mikro- und Nanosysteme
  • Simulation und Herstellung Nanoelektronischer Bauelemente

  • Praktikum Dünnschicht- und Bauelementetechnologie

Veröffentlichungen


Bücher, Zeitschriften, Tagungsbeiträge

  • M. R. Müller, R. Salazar, S. Fathipour, H. Xu3, K. Kallis, U. Künzelmann, A. Seabaugh, J. Appenzeller, J. Knoch
    "Gate-Controlled WSe2 Transistors Using a Buried Triple-Gate Structure"
    In: Nanoscale Research Letters 12/2016, 11(1)

  • R. Poloczek, C. Kontis, K. Kallis, H. Fiedler
    "Alternative Konzepte zur Integration und zum Auslesen von Drucksensoren"
    Tagungsband zur 18. GMA/ITG-Fachtagung Sensoren und Messsysteme, Nürnberg 2016, May 10-11, pp. 797-804

  • F. J. Giebel, M. Köhle, F. M. Münchenberger, K. T. Kallis, H. L. Fiedler
    „MEMS-Vakuummeter basierend auf der Leitfähigkeitsmessung von Gasen“
    Tagungsband zur 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016, Nürnberg 2016, pp. 790-796

  • F. J. Giebel, M. Köhle, P. Czyba, K. J. Kolander, K. T. Kallis, C. M. Zimmer, H. L. Fiedler
    „Fabricating freely suspended structures optimized regarding mechanical and electrochemical stability for sensor applications“
    In: Microelectronic Engineering 159 (2016), pp. 202–208

  • M. R. Müller, A. Gumprich, E. Ecik, K.T. Kallis, F. Winkler, B. Kardynal, I. Petrov, U. Kunze, J. Knoch
    "Visibility of 2D Layered Materials on Various Substrates"
    In: Journal of Applied Physics 118.14 (Oktober 2015): 145305

  • C. M. Zimmer, K. T. Kallis, C. Asbeck, D. Dietz and F. J. Giebel
    „Micro-miniaturized electron accelerator for the mobile gas ionization sensor technology“
    Journal of Sensors and Sensor Systems Vol 4, pp. 151-157, 2015

  • N. Derebasi, M. Eltez, F. Guldiken, A. Sever, K. T. Kallis, H. Kilic and E. N. Ozmutlu
    „ Influence of Geometrical Factors on Performance of Thermoelectric Material Using Numerical Methods”
    Journal of Electronic Materials, February 2015

  • S. Ebschke, J. Zimmermann, A. Wiggershaus, K. T. Kallis and H. L. Fiedler
    „Test environment for characterization of a nanoscale sensor system consisting of fluid flow sensors based on the
    Thermal-Time-of-Flight (TToF) principle and absolute pressure sensors”
    Proceedings of the 2014 IEEE Sensors Conference, Valencia, Spain 2014, November 02-05, pp. 1340-1343

  • N. Derebasi, M. Eltez, F. Guldiken, A. Sever, K. T. Kallis, H. Kilic and E. N. Ozmutlu
    „Performance of Novel Thermoelectric Cooling Module Depending on Geometrical Factors”
    Journal of Electronic Materials, November 2014

  • C.M. Zimmer, K. Yoganathan, F.J. Giebel, D. Lützenkirchen-Hecht, P. Glösekötter and K.T. Kallis
    „Photoemission properties of LaB6 thin films for the use in PIDs”
    Proceedings of the 14th International Conference on Nanotechnology, Toronto, Canada 2014, August 18-21, pp. 877-881

  • S. Ebschke, M. Wieker, J. Gerwinn, A. Loechte, K. T. Kallis and H. L. Fiedler
    „Charging effects on SOI based NEMS by the example of a nanoscale Thermal-Time-of-Flight (TToF) sensor”
    Proceedings of the 14th IEEE International Conference on Nanotechnology, Toronto, Canada 2014, August 18-21, pp. 785-788

  • C. Kontis, R. R. Poloczek, A. Balkenohl, H. Schuh, K. T. Kallis and H. L.  Fiedler
    „Full Complementary Metal Oxide Semiconductor Compatible Integration of Nano-Structured Absolute Pressure Sensors”
    Journal Quantum Matter, Volume 3, Number 4, August 2014, pp. 381-387(7)

  • K. T. Kallis, C. M. Zimmer, C. Asbeck, D. Dietz and F. J. Giebel
    „Mikro-miniaturisierte Elektronenbeschleuniger für die mobile Gas-Ionisations-Sensorik“
    ITG Fachbericht 250 zur 17. ITG/GMA Fachtagung Sensoren und Messsysteme 2014, Nürnberg, Germany 2014,
    ISBN 978-3-8007-3622-5

  • S. Ebschke, R .R. Poloczek and K .T. Kallis and H. L. Fiedler
    „Konzept eines nanoskaligen Sensorsystems zur simultanen Erfassung von Druck und Flussgeschwindigkeit in Fluiden“
    ITG Fachbericht 250 zur 17. ITG/GMA Fachtagung Sensoren und Messsysteme 2014, Nürnberg, Germany 2014,
    ISBN 978-3-8007-3622-5

  • K.T. Kallis, D. Dietz, E. Subasi, M. R. Müller, C. Kontis and C.M. Zimmer
    „Design, simulation, fabrication and characterization of nano-scaled acceleration grids”
    Microelectronic Engineering, Volume 121, May 2014, pp. 118-121

  • M.R. Müller, A. Gumprich, F. Schütte, K. T. Kallis, U. Künzelmann, S. Engels, C. Stampfer, N. Wilcke and J. Knoch
    „Buried triple-gate structures for advanced field-effect transistor devices”
    Microelectronic Engineering, Volume 119, May 2014, pp. 95-99

  • S. Brabender, K. Kolander, K.T. Kallis and H. L. Fiedler
    „Wafer Extension for Cost-Effective Front to Back Side Alignment"
    Journal of Nano Research, Vol. 27, 2014, pp. 1-4

  • S. Ebschke, R.R. Poloczek, K.T. Kallis and H.L. Fiedler
    "Beides gleichzeitig messen - Nanoskaliger Kombisensor zur simultanen Erfassung von Gasdruck und Gasfluss"

    In: chemie&more, Vol. 3.14 (2014), pp 10-12

  • C. M. Zimmer, C. Asbeck, D. Lützenkirchen-Hecht, P. Glösekötter and K. T. Kallis
    „Backside illumination of an electronic photo ionization detector realized by UV transparent thin films"
    Journal of Nano Research, Vol. 25, 2013, pp. 55-60

  • S. Ebschke, R.R. Poloczek, K.T. Kallis and H.L. Fiedler
    "A monocrystalline absolute pressure sensor with a pseudo-MOSFET read-out device for life-science applications"
    Proceedings of the IEEE Sensors Conference, Baltimore, Maryland, USA 2013, November 4 - November 6

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "Creating a monocrystalline membrane via etching and sealing of nanoholes considering its sealing behaviour"
    Journal of Nano Research Vol. 25, 2013, pp. 49-54

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "Planar technology integration of monocrystalline Silicon-membranes using nanoholes"
    Proceedings of the 13th IEEE International Conference on Nanotechnology, Beijing, China 2013, August 5 - August 8

  • C. M. Zimmer, M. Kieschnick, K. T. Kallis, J. Schubert, U. Kunze and T.Doll
    „Nano photoelectron ioniser chip using LaB6 for ambient pressure trace gas detection”
    Microelectronic Engineering, Volume 98, October 2012, pp. 472-476

  • U. Künzelmann, M. R. Mueller, K. T. Kallis, F. Schuette, S. Menzel, S. Engels, J. Fong, C. Lin, J. Dysard,
    J. W. Bartha and J. Knoch

    „Chemical-Mechanical Planarization of Aluminium Damascene Structures"
    Proceedings of the International Conference on Planarization/CMP Technology, ICPT 2012, 15.-17. October,
    Grenoble, France 2012, pp. 371-376

  • K. T. Kallis, V. V. Vendt, C. Küchenmeister and H. L. Fiedler
    „Preparation of nanoscale thermal time of flight sensors by e-beam lithography”
    Microelectronic Engineering, Volume 97, September 2012, pp. 357-360

  • K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    „Parameter fluctuations in multiple patterned deca-nm scaled CMOS structures"
    Journal of Nano Research, Volume 17, February 2012, pp.157-163

  • C. Kontis, C. Küchenmeister, M. Müller, K. Kallis and J. Knoch
    „Optimizing the identification of mono- and bilayer graphene on multilayer substrates"
    Applied Optics, Volume 51, Issue 3, January 2012, pp. 385-389

  • K. T. Kallis, J. T. Horstmann, C. Küchenmeister, L. O. Keller and H. L. Fiedler
    „Enhanced lithography independent MOSFET-fabrication on bulk silicon with sub-50 nm-dimensions"
    Transactions on Systems, Signals & Devices, Issues on Sensors, Circuits & Instrumentation Systems,
    Vol. 5, No. 4, December 2011

  • K. T. Kallis, L. O. Keller, C. Küchenmeister, J. T. Horstmann, J. Knoch and H. L. Fiedler
    „Nanofin based filaments for sensor applications“
    Proceedings of the 36th International Conference on Micro- and Nanoengineering, MNE’10, Genoa, Italy,
    Microelectronic Engineering, Volume 88, Issue 8, August 2011, pp. 2290-2293

  • J. T. Horstmann, K. T. Kallis and H. L. Fiedler
    „Reliability and Electrical Parameter Fluctuations of sub-50 nm MOS-Transistors”
    Micromaterials and Nanomaterials 12, 2010, pp. 32-38, ISSN 1619-2486

  • R. R. Poloczek, K. T. Kallis, L. O. Keller and H. L. Fiedler
    „A new cost-effective Method of Planarisation for Multiple Metal Layers in the Sub-100 nm-Region“
    Journal of Nanoscience and Nanotechnology, Volume 10, Number 9, September 2010, pp. 6046-6048

  • L. O. Keller, K. T. Kallis, R. R. Poloczek and H. L. Fiedler
    „Nano-Fin based Mercury-Sensor for environmental surveillance“
    Journal of Nanoscience and Nanotechnology, Volume 10, Number 9 September 2010, pp. 5921-5925

  • S. Brabender, K. T. Kallis, L. O. Keller and H. L. Fiedler
    „Optimization of reactive ion etching processes using desirability"
    Proceedings of the 35th International Conference on Micro and Nanoengineering, MNE’09,
    28. September - 1. Oktober 2009, Ghent, Belgium 2010, pp. 1413-1415

  • K. T. Kallis
    „Lithographieunabhängige, nanoskalige MOS-Technologie“
    Theophano Verlag Münster, ISBN-Nr. 978-3-9809338-6-5, 2009/2010

  • K. T. Kallis, L. O. Keller and H. L. Fiedler
    „An advanced LOCOS-Process for the Sub-50 nm-Region using Low-Stress PECVD-Silicon Nitrides“
    Journal of Nano Research, Volume 6, 2009, pp. 23-27

  • K. T. Kallis, J. T. Horstmann, C. Küchenmeister, L. O. Keller and H. L. Fiedler
    „Cost-Effective MOSFET-Transistors on Bulk Silicon in the Deep Sub-50 nm-Region“
    6th International Multi-Conference on Systems, Signals and Devices, SSD'09, March 23-26, Djerba 2009,
    Tunisia, Tagungsband: IEEE Press ISBN 978-9973959-16-8

  • L. O. Keller, K. T. Kallis, H. L. Fiedler and J. Knoch
    „Towards Nano-Fin based Mercury-Sensors"
    Proceedings of the 2009 Spanish Conference on Electron Devices, SCED’09, February 11-13,
    Santiago di Compostella, Spain 2009, pp. 342-344

  • J. T. Horstmann, K. T. Kallis and H. L. Fiedler
    „Experimental Threshold Voltage Fluctuations of 30 nm-NMOS-Transistors Manufactured by a Lithography Independent
    Structure Definition Process“, Procee-dings of the 34th International Conference on Micro and Nanoengineering,
    MNE’08, 15. -18. September 2008, Athens, Greece 2009, pp.1054-1056

  • K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    „Lithography Independent High Accuracy Fabrication and Characterization of Next Generation Nano-MOS-Transistors
    with L=25 nm and W=75 nm“
    Proceedings of the 32nd International Conference on Micro- and Nanoengineering, MNE’06, 17.-20. September 2006,
    Barcelona,Spain 2007, pp. 1484-1487

  • K. T. Kallis, J. T. Horstmann, A. Wiggershaus and H. L. Fiedler
    „Manufacturing Considerations of Lithography Independent Nano-MOS-Transistors in the Sub-25 nm-Region“
    8th International Conference on Solid-State and Integrated Circuit Technology Proceedings, IEEE Catalog Number:
    06EX1294 Shanghai, China, October 2006, pp. 55-57

  • C. Horst, K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    „CMOS Compatible Fabrication Technique for Nano-Transistors by Conventional Optical Lithography“
    Journal of Semiconductor Technology and Science, Volume 4, Number 1, March 2004, pp.41-44

  • C. Horst, K. T. Kallis, J. T. Horstmann and K. F. Goser
    „Lithography-independent fabrication of nano-MOS-transistors with W = 25 nm and L = 25 nm“
    Fifth International Symposium on Instrumentation and Control Technology, Beijing, China, 24-27 Oct. 2003,
    Proceedings of the SPIE - The International Society for Optical Engineering, USA , Volume 5253 (2004), Number 1, pp. 223-227

  • C. Horst, K. T. Kallis and J. T. Horstmann
    „Lithographieunabhängige Fertigung von MOS-Transistoren im Sub-100 nm-Bereich“, Tagungsband  Informationstagung
    Mikroelektronik 2003, Österreichischer Verband für Elektrotechnik, Wien, Austria 2003, pp. 47-52


    Vorträge auf internationalen Tagungen

  • C. M. Zimmer, K. T. Kallis
    "TMDC Monolayer as Electron Emitter for Gas Detectors"
    5th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2016, June 26-30

  • P. Czyba, S. Brabender, K. T. Kallis, H. L. Fiedler
    "Modelling and Development of Germanium Based Drift Detector Devices"
    5th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2016, June 26-30

  • K. T. Kallis, R. R. Poloczek, M. Seiffert, S. Brabender, H. L. Fiedler, P. Glösekötter
    " On-Chip vs Off-Chip -Nanosensor Readout Strategies"
    5th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2016, June 26-30

  • K. T. Kallis, M. R. Müller, J. Knoch, A. Gumprich, D. Merten
    "Electrostatic Doping of 2D-materials - from single devices toward circuitry exploration"
    5th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2016, June 26-30

  • K. T. Kallis, C. M. Zimmer, C. Asbeck, D. Dietz and F. J. Giebel
    „Mikro-miniaturisierte Elektronenbeschleuniger für die mobile Gas-Ionisations-Sensorik“
    17. ITG/GMA Fachtagung Sensoren und Messsysteme 2014, Nürnberg, Germany 2014, June 3-4

  • F. J. Giebel, M. Köhle, P. Czyba, K. Kolander, K. T. Kallis, C. M. Zimmer and H. L. Fiedler
    „Manufacturing a chip to accelerate electrons on microscopic scale for gas sensor applications"
    41st International Conference on Micro- and Nanoengineering (MNE'15), The Hague, Netherland 2015, September 22-26

  • K. T. Kallis
    „Pulsed Magnetron Sputtering in Practice"
    Workshop on dry processing, Jülich, Germany 2015, September 14-15

  • R. R. Poloczek, K. T. Kallis, C. Kontis, M. Schneider and H. L. Fiedler
    „Membrane Stiffness Tuning for Micro-machined Pressure Sensors”
    EnFI 2015 Conference – Engineering of functional Interfaces, Hannover, Germany, 2015, July 06-07

  • K. T. Kallis
    "Pulsed Magnetron Sputtering in Practice"
    Workshop on dry processing, Jülich, Germany 2015

  • S. Ebschke, J. Zimmermann, R. R. Poloczek, K. T. Kallis, H. L. Fiedler
    "Towards a nanoscale sensor system for intra-arterial simultaneous blood flow and pressure measurement"
    EnFI 2015 Conference, Hannover, Germany 2015, July 06 -07

  • S. Ebschke, M. Wieker, M. Muehlbauer, K. T. Kallis and H. L. Fiedler
    "Optimization of a nanoscale Thermal-Time-of-Flight (TToF) sensor by using electron-beam lithography (EBL)"
    Workshop Ionenstrahlen & Nanostrukturen, Paderborn, Germany 2014, July 20 – July 22

  • K. T. Kallis
    „Intelligente Mikro- und Nanosysteme - wenn Visionen zur Realität werden “
    6. NRW Nanokonferenz, Dortmund, Germany 2014, December 1-2

  • M. R. Müller, U. Künzelmann, S. Menzel, I. Petrov, K. T. Kallis and J. Knoch
    „Tackling Hillocks Growth after Aluminum CMP”
    Proceedings of the 2014 International IEEE Conference on Planarization/CMP Technology (ICPT), Kobe,
    Japan 2014, November 19-21, pp. 129-132 (peer reviewed)

  • S. Ebschke, J. Gerwinn, A. V. Patel, K. T. Kallis, H. L. Fiedler
    "Modelling and Simulation of a Thermal-Time-of-Flight (TToF) Sensor for measuring the blood flow velocity"
    BMT 2014 - 48th DGBMT Annual Conference, Hannover, Germany 2014, October 8 - October 10

  • C.M. Zimmer, K. Yoganathan, F.J. Giebel, D. Lützenkirchen-Hecht, P. Glösekötter and K.T. Kallis
    „Photoemission properties of LaB6 thin films for the use in PIDs”
    Proceedings of the 14th International Conference on Nanotechnology, Toronto, Canada 2014, August 18-21

  • N. Derebasi, M. Eltez, F. Guldiken, A. Sever, K. T. Kallis, H. Kilic and E. N. Ozmutlu
    „Performance of Novel Thermoelectric Cooling Module Depending on Geometrical Factors“
    International Conference on Thermoelectrics - ICT2014, Nashville, Tennessee, USA 2014, July 6-10

  • C. M. Zimmer, D. Dietz, D. Lützenkirchen-Hecht, P. Glösekötter and K. T. Kallis
    " Optimization of capacious electron emitters based on LaB6 and ITO for PID“
    10th International Nanotechnology Symposium, Dresden, Germany 2014, July 1-3


  • S. Ebschke, M. Wieker, J. Gerwinn, K. T. Kallis and H. L. Fiedler
    „Nanoscale thermal-time-of-flight sensor for measuring blood flow velocity“
    10th International Nanotechnology Symposium, Dresden, Germany 2014, July 1-3


  • K. T. Kallis, C. M. Zimmer, C. Asbeck, D. Dietz and F. J. Giebel
    „Mikro-miniaturisierte Elektronenbeschleuniger für die mobile Gas-Ionisations-Sensorik“
    17. ITG/GMA Fachtagung Sensoren und Messsysteme 2014, Nürnberg, Germany 2014, June 3-4


  • S. Ebschke, R .R. Poloczek and K .T. Kallis and H. L. Fiedler
    „Konzept eines nanoskaligen Sensorsystems zur simultanen Erfassung von Druck und Flussgeschwindigkeit in Fluiden“
    17. ITG/GMA Fachtagung Sensoren und Messsysteme 2014, Nürnberg, Germany 2014, June 3-4

  • M. R. Müller, A. Gumprich, K. T. Kallis, U. Künzelmann, S. Engels, C. Stampfer, N. Wilck, B. Hadam and J. Knoch
    „Buried Triple-Gate Structures for InAs-Nanowire Field-Effect Transistor Devices“
    2013 MRS Fall Meeting & Exhibit, Boston, Massachusetts, USA 2013, December 1-6

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    "A monocrystalline absolute pressure sensor with a pseudo-MOSFET read-out device for life-science applications"
    IEEE Sensors Conference, Baltimore, Maryland, USA 2013, November 4-6

  • K. T. Kallis, E. Subasi, C. Kontis, M. R. Müller and C. M. Zimmer
    „Design, simulation, fabrication and characterisation of nano-scaled acceleration grids“
    39th International Conference on Micro- and Nanoengineering (MNE'13), London, Great Britain 2013, September 16-19

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    „Planar technology integration of monocrystalline Silicon-membranes using nanoholes"
    13th IEEE International Conference on Nanotechnology, Beijing, China 2013, August 5-8

  • C. Kontis, K. T. Kallis, R. R Poloczek and H. L. Fiedler
    „Full CMOS-Compatible Integration of Nano-Strucured Absolute Pressure Sensors”
    4th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2013,
    Corfu, Greece 2013, June 16 - June 20

  • K. T. Kallis, V. V. Vendt, C. Küchenmeister and H. L. Fiedler
    „Nanoscale thermal time of flight sensors"
    37th International Conference on Micro- and Nanoengineering (MNE'11), Berlin, Germany 2011, September 19-23

  • R. R. Polczek, P. Filusch, K. T. Kallis and H. L. Fiedler
    „Manufacturing of cavities with monocrystalline silicon membranes for pressure sensors using annealing forming
    gas procedures"
    37th International Conference on Micro- and Nanoengineering (MNE'11), Berlin, Germany 2011, September 19-23

  • K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    „Parameter fluctuations in multiple patterned deca-nm scaled CMOS structures"
    3rd International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems, Crete,
    Greece 2011, July 26-29

  • K. T. Kallis and J. T. Horstmann
    „Parameter fluctuations on lithography independent nanowire MOSFETs on bulk silicon“
    2nd International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems, Rhodes,
    Greece 2009, June 28 - July 3

  • K. T. Kallis, J. T. Horstmann, C. Küchenmeister, L. O. Keller and H. L. Fiedler
    „Cost-Effective MOSFET-Transistors on Bulk Silicon in the Deep Sub-50 nm-Region“
    6th International Multi-Conference on Systems, Signals and Devices, SSD'09, March 23-26, Djerba, Tunisia 2009

  • K. T. Kallis, L. O. Keller and H. L. Fiedler
    „An advanced LOCOS-Process for the Sub-50 nm-Region using Low-Stress PECVD-Silicon Nitrides“
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2008,
    Porto Carras, Greece 2008, June 16-18

  • K. T. Kallis, J. T. Horstmann, A. Wiggershaus and H. L. Fiedler
    „Manufacturing Considerations of Lithography Independent Nano-MOS-Transistors in the Sub-25 nm-Region“
    8th International Conference on Solid-State and Integrated Circuit Technology, Shanghai, China 2006, October 23-26



Posterbeiträge auf internationalen Tagungen

  • F. J. Giebel, M. Köhle, F. M. Münchenberger, K. T. Kallis, H. L. Fiedler
    „MEMS-Vakuummeter basierend auf der Leitfähigkeitsmessung von Gasen“
    18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016, Nürnberg, 10. bis 11. Mai 2016

  • F. J. Giebel, M. Köhle, P. Czyba, K. Kolander, K. T. Kallis, C. M. Zimmer and H. L. Fiedler
    „Manufacturing a chip to accelerate electrons on microscopic scale for gas sensor applications”
    41st International Conference on Micro- and Nanoengineering (MNE 2015), The Hague, Netherlands 2015, September 21-24

  • S. Ebschke, J. Zimmermann, A. Wiggershaus, K. T. Kallis and H. L. Fiedler
    „Test environment for characterization of a nanoscale sensor system consisting of fluid flow sensors based on the
    Thermal-Time-of-Flight (TToF) principle and absolute pressure sensors"
    IEEE Sensors Conference, Valencia, Spain, 2014, November 02-05

  • S. Ebschke, J. Gerwinn, A. V. Patel, K. T. Kallis and H. L. Fiedler
    "Modelling and Simulation of a Thermal-Time-of-Flight (TToF) Sensor for measuring the blood flow velocity"
    BMT 2014 - 48th DGBMT Annual Conference, Hannover, Germany 2014, October 8 - October 10

  • K. T. Kallis, M. Seiffert, H. L. Fiedler and P. Glösekötter
    „Nanosensor readout concepts”
    40th International Conference on Micro- and Nanoengineering (MNE'14), Lausanne, Switzerland  2014, September 22-26

  • C. M. Zimmer, P. Czyba, F. J. Giebel, D. Lützenkirchen- Hecht, P. Glösekötter and K. T. Kallis
    „Optimization of an Electronic Photo-Ionization Detector by Integrating a Capture Anode”
    40th International Conference on Micro- and Nanoengineering (MNE'14), Lausanne, Switzerland  2014, September 22-26

  • S. Ebschke, M. Wieker, J. Gerwinn, A. Loechte, K. T. Kallis and H. L. Fiedler
    „Charging effects on SOI based NEMS by the example of a nanoscale Thermal-Time-of-Flight (TToF) sensor”
    14th International Conference on Nanotechnology, Toronto, Canada 2014, August 18-21

  • N. Derebasi, M. Eltez, F. Guldiken, A. Sever, K. T. Kallis, H. Kilic and E. N. Ozmutlu
    „Influence of geometrical factors on performance of thermoelectric material using numerical methods“
    International Conference on Thermoelectrics - ICT2014, Nashville, Tennessee, USA, 2014, July 6-10

  • S. Ebschke, M. Wieker, J. Gerwinn, K. T. Kallis and H. L. Fiedler
    "Nanoscale thermal-time-of-flight sensor for measuring blood flow velocity"
    10th International Nanotechnology Symposium - New ideas for industry -, Dresden, Germany 2014, July 1 - July 3

  • M. R. Müller, A. Gumprich, K. T. Kallis, U. Künzelmann, S. Engels, C. Stampfer, N. Wilck, B. Hadam and J. Knoch
    „Triple-Gate Structures for Advanced Field-Effect Transistor Devices”
    39th International Conference on Micro- and Nanoengineering (MNE'13), London, Great Britain 2013, September 16-19

  • S. Ebschke, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    „Sticking prevention of nano-structured monocrystalline silicon-membranes"
    4th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2013,
    Corfu, Greece 2013, June 16-20

  • S. Brabender, R. R. Poloczek, K. T. Kallis and H. L. Fiedler
    „Wafer extension for cost-effective front to back side alignment”
    4th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2013,
    Corfu, Greece 2013, June 16-20

  • C. M. Zimmer, C. Asbeck, D. Lützenkirchen-Hecht, P. Glösekötter and K. T. Kallis
    „Functionality Improvement of an Electronic Photoionization Detector by Using UV Transparent Thin Films”
    4th International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems 2013,
    Corfu, Greece 2013, June 16-20

  • U. Künzelmann, M. R. Mueller, K. T. Kallis, F. Schuette, S. Menzel, S. Engels, J. Fong, C. Lin, J. Dysard,
    J. W. Bartha and J. Knoch

    „Chemical-Mechanical Planarization of Aluminium Damascene Structures”
    International Conference on Planarization/CMP Technology, ICPT 2012,  Grenoble, France 2012, October 15-17

  • C. M. Zimmer, M. Kieschnick, K. T. Kallis, J. Schubert, U. Kunze and T. Doll
    „Nano photoelectron ioniser chip using LaB6 for ambient pressure trace gas detection"
    37th International Conference on Micro- and Nanoengineering (MNE'11), Berlin, Germany 2011, September 19-23

  • S. Brabender, K. T. Kallis, C. Kontis and H. L. Fiedler
    „Low temperature PECVD-SiO2 on germanium"
    37th International Conference on Micro- and Nanoengineering (MNE'11), Berlin, Germany 2011, September 19-23

  • S. Brabender, K. T. Kallis, L. O. Keller and H. L. Fiedler
    „Optimization of reactive ion etching processes using desirability“
    35th International Conference on Micro- and Nanoengineering, MNE’09, Ghent, Belgium 2009, September 28 - October 1

  • R. R. Poloczek, K. T. Kallis, L. O. Keller, S. Brabender and H. L. Fiedler
    „Multiple Nanolayers for optimal membrane stiffness in integrated high pressure sensors"
    2nd International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems, Rhodes,
    Greece 2009, June 28 - July 3

  • L. O. Keller, K. T. Kallis, H. L. Fiedler and J. Knoch
    „Towards Nano-Fin based Mercury Sensors“
    7th Spanish Conference on Electron Devices, Santiago de Compostela, Spain 2009, February 11-13

    L. O. Keller, K. T. Kallis, R. R. Poloczek and H. L. Fiedler
    „Nano-Fin based Mercury-Sensor for environmental surveillance“
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems, Porto Carras,
    Greece 2008, June 16-18

  • R. R. Poloczek, L. O. Keller, K. T. Kallis and H. L. Fiedler
    „A new cost-effective Method of Planarisation for Multiple Metal Layers in the Sub-100 nm-Region“
    1st International Conference from Nanoparticles and Nanomaterials to Nanodevices and Nanosystems, Porto Carras,
    Greece 2008, June 16-18
  • J. T. Horstmann, K. T. Kallis and H. L. Fiedler
    „Experimental Threshold Voltage Fluctuations of 30 nm-NMOS-Transistors Manufactured by a Lithography Independent
    Structure Definition Process“
    34th International Conference on Micro and Nanoengineering, MNE’08, Athens, Greece 2008, September 15-18

  • K. T. Kallis, L. O. Keller and H. L. Fiedler
    „Method for Local Oxidation in the Sub-50 nm-Region“,
    34th International Conference on Micro and Nanoengineering, MNE’08, Athens, Greece 2008, September 15-18

  • K. T. Kallis, J. T. Horstmann and H. L. Fiedler
    „Lithography Independent High Accuracy Fabrication and Characterization of Next Generation Nano-MOS-Transistors
    with L=25 nm and W=75 nm“,
    32nd International Conference on Micro and Nanoengineering, MNE’06, Barcelona, Spain 2006, September 15-18